Crystal orientation range

Fast, accurate crystal orientation

Crystal orientation range

A crystal is a repeating pattern of atoms which means that what we see from the point-of-view of an electron/photon going into this crystal, will depend on the angle we are looking into this crystal. The view could be a channel pointing all the way through the crystal or just the top three layers of the material, therefore the material properties can be quite different depending on the angle. A good control of the material properties requires a good control of the crystal orientation.

It is an important process in ion implantation, lithography, epitaxy but also for example when making a laser or optical components.

The Crystal Orientation range is based on Azimuthal scan, a smart geometrical measurement technique to orient the crystal. That means that we can find not only the tilt of the main axis, but also all in-plain directions in as fast as 10 seconds. The instruments can measure almost any shape as long as it is a single crystal, such as wafers, ingots, boules, pucks etc.

Well designed for industrial applications such as single crystal or wafer manufacturers, research purposes but also for quality control of the wafers and other devices, 

Our highly precise Crystal Orientation systems offer simple and quick crystal orientation measurements, ensuring the desired properties are there for the next processing steps.

DDCOM

Ultra-fast, bottom surface measuring crystal orientation in a compact package

Features include

  • Benchtop device
  • Higher throughput due to no height alignment
DDCOM

SDCOM

Ultra-fast, flexible, top surface measuring crystal orientation in a compact package

Features include

  • Benchtop device
  • Outstanding accuracy, fit for samples from 2 mm² up to 300 mm Ø wafers
SDCOM

Omega/Theta

Fully automated vertical three-axis X-ray diffractometer for ultra-fast crystal orientation

Features include

  • As fast as 10 seconds per full crystal measurement
  • Higher throughput and outstanding accuracy compared to conventional systems
  • Flexible with accessories for marking, mapping, alignments for transfers of all single crystalline materials
Omega/Theta

Wafer XRD 200

Fast, precise and fully equipped solution for wafer orientation and sorting

Features include

  • High capacity wafer metrology; full cassette of 25 wafers measured in less than 10 minutes
  • Optimal for Wafer Production: measure crystal orientation, recognize wafer ID, flat/notch and shape of wafer edge
Wafer XRD 200

Wafer XRD 300

Integratable wafer orientation solution

Features include

  • High throughput wafer metrology system
  • Supports 300mm Si wafers
  • Optimal for Wafer Production: measure crystal orientation, recognize wafer ID, flat/notch and shape of wafer edge
Wafer XRD 300

XRD-OEM

Fully automated in-line orientation and handling of ingots, boules, and pucks

Features include

  • Measurement head for crystal orientation
  • Built for integration into e.g. cutting and grinding machines
XRD-OEM

How our products compare

  • DDCOM

    Ultra-fast, bottom surface measuring crystal orientation in a compact package

    DDCOM
    • X-ray Diffraction (XRD)
    • Crystal orientation

    System type

    • Benchtop
    • Mapping stage
    • Grinding stage
    • Stacking stage

    Tube power

    • 30kV / 1mA

    Cooling system

    • Air cooling
    • Marking

    Optical Geometry Recognition

    • No
    • Rocking curves (crystal quality of the sample)
    • Theta Scans (for orientation with basic optics only)

    Throughput speed

    • 10+ seconds
  • SDCOM

    Compact, ultra-fast, top surface measuring crystal orientation

    SDCOM
    • X-ray Diffraction (XRD)
    • Crystal orientation

    System type

    • Benchtop
    • Mapping stage
    • Grinding stage
    • Stacking stage

    Tube power

    • 30kV / 1mA

    Cooling system

    • Air cooling
    • Marking

    Optical Geometry Recognition

    • Optional for Boules
    • Rocking curves (crystal quality of the sample)
    • Theta Scans (for orientation with basic optics only)

    Throughput speed

    • Height alignment + 10 seconds
  • Omega/Theta

    Fully automated vertical three-axes X-ray diffractometer for ultra-fast crystal orientation

    Omega/Theta
    • X-ray Diffraction (XRD)
    • Crystal orientation

    System type

    • Floor standing
    • Mapping stage
    • Grinding stage
    • Stacking stage

    Tube power

    • 30kV / 10mA

    Cooling system

    • Water cooling
    • Marking

    Optical Geometry Recognition

    • Optional for Boules
    • Rocking curves (crystal quality of the sample)
    • Theta Scans (for orientation with basic optics only)

    Throughput speed

    • Height alignment + 10 seconds
  • Wafer XRD 200

    Fast, precise and fully equipped solution for wafer orientation and sorting

    Wafer XRD 200
    • X-ray Diffraction (XRD)
    • Crystal orientation

    System type

    • Floor standing
    • Mapping stage
    • Grinding stage
    • Stacking stage

    Tube power

    • 30kV / 1mA

    Cooling system

    • Air cooling
    • Marking

    Optical Geometry Recognition

    • Yes
    • Rocking curves (crystal quality of the sample)
    • Theta Scans (for orientation with basic optics only)

    Throughput speed

    • 10 minutes for 25 wafers
  • Wafer XRD 300

    Your integratable wafer orientation solution

    Wafer XRD 300
    • X-ray Diffraction (XRD)
    • Crystal orientation

    System type

    • Floor standing
    • Mapping stage
    • Grinding stage
    • Stacking stage

    Tube power

    • 30kV / 1mA

    Cooling system

    • Water cooling
    • Marking

    Optical Geometry Recognition

    • Yes
    • Rocking curves (crystal quality of the sample)
    • Theta Scans (for orientation with basic optics only)

    Throughput speed

    • --
  • XRD-OEM

    Fully automated in-line orientation and handling of ingots, boules, and pucks

    XRD-OEM
    • X-ray Diffraction (XRD)
    • Crystal orientation

    System type

    • Measurement head
    • Mapping stage
    • Grinding stage
    • N/A

    Tube power

    • 30kV / 1mA

    Cooling system

    • Air cooling
    • Marking

    Optical Geometry Recognition

    • Coming soon
    • Rocking curves (crystal quality of the sample)
    • Theta Scans (for orientation with basic optics only)

    Throughput speed

    • Depending on the machine