Additional sample stages
Measure a wider range of sample sizes in different process stages with additional sample stages designed to accommodate crystals smaller or larger than average.
Overview
The Omega/Theta is your reliable future-proof partner for determining crystal orientation in the fast-evolving semiconductor landscape. Market-leading precision, super-fast measurement speed, and high-end build quality are combined with the power of automation, offering unparalleled efficiency and precision for crystal orientation and alignment in industry and research applications
Features and Benefits
Ultra-fast and precise: Azimuthal scan method
The azimuthal scan method requires only one measuring rotation to gather all the necessary data to fully determine the orientation, delivering the results within 10 seconds whilst not compromising accuracy.
The sample is rotated 360o, with the X-ray source and detector positioned to achieve a certain number of reflections per turn. These reflections enable the orientation of the crystal lattice to be measured in relation to the rotation axis with high precision of up to 0.003o.
User-friendly
All measurements on the Omega/Theta are automated and are managed from within the user-friendly XRD software, which offers ready-made easy recipe-based measurements for routine workflow.
The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM and similar interfaces.
Characterize a range of materials
Omega/Theta can be used to characterize any single crystalline materials. Commonly used materials include:
- Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
- Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
- Tetragonal: MgF2, TiO2, SrLaAlO4
- Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
- Orthorhombic: Mg2SiO4, NdGaO3
- Any other single crystalline material
Convenient, flexible sample handling
Our wide range of accessories enhance the productivity of Omega/Theta in a variety of applications from seed boring to boule grinding, to slicing all the way to wafer end control – keeping you flexible even if those needs change over time.
With specialized sample-holders to meet any need from large ingots to tiny plates, the Omega/Theta can accommodate a wide range of sample sizes – adding value to both production and research.
- Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid
- Stacking stage to align ingots before sawing
- Additional sample rotation axis
- Sample adjustment equipment
- There are many more custom engineering solutions!
With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.
Key Applications
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- Production
- The Omega/Theta was designed for manufacturers. It’s ideal for the ultra-fast orientation and alignment of various crystal types in production, for marking in-plane directions, or checking the orientation of flats or notches. It is also ideal for production quality control, thanks to its high throughput speeds and automation capabilities.
- Optional extras, such as a stacking stage for aligning ingots before sawing and a rocking curve tool for quality measurements, make the Omega/Theta a versatile partner for production applications.
- Materials research
- The high precision and flexibility of the Omega/Theta means it is ideal for materials research, as it can accommodate a range of samples up to 30 kg and 450 mm in length, with additional stages available for larger or more complex samples.
- It’s able to characterize a wide range of materials, making it highly valuable for your R&D processes – and the flexible Theta Scan opens up a world of measurement possibilities.
Specification
| Technical specification | |
|---|---|
| X-ray source | Standard X-ray tube, Cu anode |
| Detector | Scintillation counter (single or double) |
| Sample holder | Precise turntable, mounting plate and tools for sample adjustment |
| Crystal collimator | Available |
| Mapping | Heavy duty mapping stage available |
| Software | XRDStudio |
| Water cooling | Flow – 4l/min, max. pressure 8 bar, T ≤ 30°C |
| PC workstation | Windows 7 or latest, .NET Framework update |
| Dimensions | H 1950 mm × D 820 mm × W 1200 mm |
| Weight | ca, 650 kg |
| Power requirement | 208-240 V, 16 A single phase, 50-60 Hz |
| Certification | Manufactured under ISO 9001 guidelines, CE conform |
Accessories
Sample adjustment equipment
Easily handle your various types of samples with dedicated sample adjustment tools.
Automatic X-Y mapping stage
Easily map crystal orientation or surface distortions onto a user-defined grid using an additional X-Y positioning stage above the turntable. The mapping stage enables comprehensive exploration of the entire sample surface via a customizable surface scan.
Stacking stage
Precisely align ingots before sawing and enhance tool utilisation. The efficient stacking stage aligns ingots during the Azimuthal-scan, before transferring the complete stack over to the wire saw. This parallel sawing method is highly efficient.
Rocking curve capability
Rapid and accurate quality control measurements for production processes. The rocking curve, indicative of lattice quality, can be assessed rapidly pointwise or in conjunction with a mapping tool for a quality map. The optic is automated for easy on/off toggling.
Laser scanner for boule shape measurement
An optional laser scanner enables the measurement of precise sample shape, giving you deeper insight into your materials.
Support
Support services
- Phone and remote support
- Preventive maintenance and checkups
- Flexible Customer Care Agreements
- Performance certificates
- Hardware and software upgrades
- Local and global support
Expertise
- Turnkey solutions for elemental and structural semiconductor metrology
- Automation and consultancy
- Training and education
