Omega/Theta

Fully automated vertical three-axes X-ray diffractometer for ultra-fast crystal orientation

The Omega/Theta delivers the ultimate in combined precision and speed for determining the crystal lattice orientation. It features many process accessories from barcode readers to mapping tables and a crystal stacking frame. Omega/Theta is your reliable partner for finding the orientation of the crystals and transferring to the next processing step.

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Overview

The Omega/Theta is your reliable future-proof partner for determining crystal orientation in the fast-evolving semiconductor landscape. Market-leading precision, super-fast measurement speed, and high-end build quality are combined with the power of automation, offering unparalleled efficiency and precision for crystal orientation and alignment in industry and research applications

Features and Benefits

Ultra-fast and precise: Azimuthal scan method

The azimuthal scan method requires only one measuring rotation to gather all the necessary data to fully determine the orientation, delivering the results within 10 seconds whilst not compromising accuracy.

The sample is rotated 360o, with the X-ray source and detector positioned to achieve a certain number of reflections per turn. These reflections enable the orientation of the crystal lattice to be measured in relation to the rotation axis with high precision of up to 0.003o.

User-friendly

All measurements on the Omega/Theta are automated and are managed from within the user-friendly XRD software, which offers ready-made easy recipe-based measurements for routine workflow. 

The instrument can be easily integrated into existing processes in production environments using its various MES, SECS/GEM and similar interfaces. 

Characterize a range of materials

Omega/Theta can be used to characterize any single crystalline materials. Commonly used materials include:

  • Cubic, arbitrary unknown orientation: Si, Ge, GaAs, GaP, InP
  • Cubic, special orientation: Ag, Au, Ni, Pt, GaSb, InAs, InSb, AlSb, ZnTe, CdTe, SiC3C, PbS, PbTe, SnTe, MgO, LiF, MgAl2O4, SrTiO3, LaTiO3
  • Tetragonal: MgF2, TiO2, SrLaAlO4
  • Hexagonal and trigonal: SiC 2H, 4H, 6H, 15R, GaN, ZnO, LiNbO3, SiO2 (quartz), Al2O3 (sapphire), GaPO4, La3Ga5SiO14
  • Orthorhombic: Mg2SiO4, NdGaO
  • Any other single crystalline material

Convenient, flexible sample handling

Our wide range of accessories enhance the productivity of Omega/Theta in a variety of applications from seed boring to boule grinding, to slicing all the way to wafer end control – keeping you flexible even if those needs change over time. 

With specialized sample-holders to meet any need from large ingots to tiny plates, the Omega/Theta can accommodate a wide range of sample sizes – adding value to both production and research.

  • Automatic X-Y mapping stage to map crystal orientation or surface distortions on a user-defined grid 
  • Stacking stage to align ingots before sawing 
  • Additional sample rotation axis
  • Sample adjustment equipment
  • There are many more custom engineering solutions!

With customized sample-holders to meet any need from large ingots to tiny cylinders, the Omega/Theta can accommodate a wide range of sample sizes – ensuring that it is equally at home in a production workflow as in research.

Key Applications

Production
The Omega/Theta was designed for manufacturers. It’s ideal for the ultra-fast orientation and alignment of various crystal types in production, for marking in-plane directions, or checking the orientation of flats or notches. It is also ideal for production quality control, thanks to its high throughput speeds and automation capabilities. 
Optional extras, such as a stacking stage for aligning ingots before sawing and a rocking curve tool for quality measurements, make the Omega/Theta a versatile partner for production applications.
Materials research
The high precision and flexibility of the Omega/Theta means it is ideal for materials research, as it can accommodate a range of samples up to 30 kg and 450 mm in length, with additional stages available for larger or more complex samples. 
It’s able to characterize a wide range of materials, making it highly valuable for your R&D processes – and the flexible Theta Scan opens up a world of measurement possibilities.

Specification

Technical specification
X-ray source Standard X-ray tube, Cu anode
Detector Scintillation counter (single or double)
Sample holder Precise turntable, mounting plate and tools for sample adjustment
Crystal collimator Available
Mapping Heavy duty mapping stage available
Software XRDStudio
Water cooling Flow – 4l/min, max. pressure 8 bar, T ≤ 30°C
PC workstation Windows 7 or latest, .NET Framework update
Dimensions H 1950 mm × D 820 mm × W 1200 mm
Weight ca, 650 kg
Power requirement 208-240 V, 16 A single phase, 50-60 Hz
Certification Manufactured under ISO 9001 guidelines, CE conform

Accessories

Additional sample stages

Measure a wider range of sample sizes in different process stages with additional sample stages designed to accommodate crystals smaller or larger than average.

Additional sample stages

Sample adjustment equipment

Easily handle your various types of samples with dedicated sample adjustment tools.

Sample adjustment equipment

Automatic X-Y mapping stage

Easily map crystal orientation or surface distortions onto a user-defined grid using an additional X-Y positioning stage above the turntable. The mapping stage enables comprehensive exploration of the entire sample surface via a customizable surface scan.

Automatic X-Y mapping stage

Stacking stage

Precisely align ingots before sawing and enhance tool utilisation. The efficient stacking stage aligns ingots during the Azimuthal-scan, before transferring the complete stack over to the wire saw. This parallel sawing method is highly efficient. 

Stacking stage

Rocking curve capability

Rapid and accurate quality control measurements for production processes. The rocking curve, indicative of lattice quality, can be assessed rapidly pointwise or in conjunction with a mapping tool for a quality map. The optic is automated for easy on/off toggling.

Rocking curve capability

Laser scanner for boule shape measurement

An optional laser scanner enables the measurement of precise sample shape, giving you deeper insight into your materials. 

Laser scanner for boule shape measurement

Transfer fixtures

Perfectly align before transferring the sample into your sawing process with the surface orientation device.

Transfer fixtures

Support

Support services 

  • Phone and remote support
  • Preventive maintenance and checkups
  • Flexible Customer Care Agreements
  • Performance certificates
  • Hardware and software upgrades
  • Local and global support

Expertise

  • Turnkey solutions for elemental and structural semiconductor metrology
  • Automation and consultancy
  • Training and education
The ultra-fast future is now. Don’t get left behind.

The ultra-fast future is now. Don’t get left behind.

Smart, efficient processes are your advantage in a changing industry – and they start with the Omega/Theta. Fully automated crystal orientation and alignment at the highest speed.

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