X'Pert³

新一代的 X’Pert 平台

Malvern Panalytical 的全新 X'Pert³ 系列 XRD 繞射系統將延續發揚 X'Pert 平台的輝煌成果。具備嶄新的嵌入式電子控制平台，加上符合最新、最嚴謹的 X 光安全規範，以及在環境友善和可靠性方面的進展，X'Pert³ 平台已為未來發展做好準備。

联系应用支持

支持的产品

测量: Epitaxy analysis
Interface roughness
Phase identification
Phase quantification
Reciprocal space analysis
Residual stress
Texture analysis
Thin film metrology

Wafer mapping: 100 mm

C-to-C wafer loader: No

Goniometer configuration: Horizontal goniometer, Θ-2Θ

Minimum step size: 0.0001º

技術類型: X-ray Diffraction (XRD)

X'Pert³ MRD

测量: Epitaxy analysis
Phase identification
Phase quantification
Thin film metrology
Residual stress
Texture analysis
Reciprocal space analysis
Interface roughness

Wafer mapping: 200 mm

C-to-C wafer loader: Yes

Goniometer configuration: Horizontal goniometer, Θ-2Θ

Minimum step size: 0.0001º

Detector: PIXcel1D, PIXcel3D, Proportional counter, Scintilation detector

X-ray tube anode material: Cu, Co,Cr, Mn, Fe, Mo

技術類型: X-ray Diffraction (XRD)

X'Pert³ MRD XL

测量: 3D structure / imaging
Contaminant detection and analysis
Crystal structure determination
Interface roughness
Phase identification
Phase quantification
Pore size distribution
Residual stress
Surface area
Thin film metrology

Wafer mapping: No

C-to-C wafer loader: No

Goniometer configuration: Vertical goniometer, Θ-Θ

Minimum step size: 0.001º

Detector: PIXcel3D, Proportional counter, Scintilation detector

X-ray tube anode material: Cu, Co,Cr, Mn, Fe, Mo, Ag

技術類型: X-ray Diffraction (XRD)

X'Pert³ Powder