X'Pert³

개선된 X’Pert 플랫폼

X'Pert의 성공이 Malvern Panalytical X선 회절 시스템의 신형 X'Pert³ 시리즈에서 계속됩니다. 새로운 온보드 제어 전자 장치가 있고, 가상 엄격한 최신 X선 및 운동 안전성 표준을 준수하고, 환경친화성과 신뢰성에서 앞서가는 X'Pert³는 미래를 내다보는 플랫폼입니다.

지원팀 연락처

지원되는 제품

측정: Epitaxy analysis
Interface roughness
Phase identification
Phase quantification
Reciprocal space analysis
Residual stress
Texture analysis
Thin film metrology

Wafer mapping: 100 mm

C-to-C wafer loader: No

Goniometer configuration: Horizontal goniometer, Θ-2Θ

Minimum step size: 0.0001º

기술 유형: X-ray Diffraction (XRD)

X'Pert³ MRD

측정: Epitaxy analysis
Phase identification
Phase quantification
Thin film metrology
Residual stress
Texture analysis
Reciprocal space analysis
Interface roughness

Wafer mapping: 200 mm

C-to-C wafer loader: Yes

Goniometer configuration: Horizontal goniometer, Θ-2Θ

Minimum step size: 0.0001º

Detector: PIXcel1D, PIXcel3D, Proportional counter, Scintilation detector

X-ray tube anode material: Cu, Co,Cr, Mn, Fe, Mo

기술 유형: X-ray Diffraction (XRD)

X'Pert³ MRD XL

측정: 3D structure / imaging
Contaminant detection and analysis
Crystal structure determination
Interface roughness
Phase identification
Phase quantification
Pore size distribution
Residual stress
Surface area
Thin film metrology

Wafer mapping: No

C-to-C wafer loader: No

Goniometer configuration: Vertical goniometer, Θ-Θ

Minimum step size: 0.001º

Detector: PIXcel3D, Proportional counter, Scintilation detector

X-ray tube anode material: Cu, Co,Cr, Mn, Fe, Mo, Ag

기술 유형: X-ray Diffraction (XRD)

X'Pert³ Powder