Is the Omega/Theta or SDCOM best for YOUR crystal orientation and mapping needs?

by Jürgen Alizoti, Friday, 24th January 2025

Two steps are essential in semiconductor research, production, and quality control. First, to verify uniform crystal orientation in the silicon wafer, which is key to achieving the desired electronic properties. Second, to evaluate stress in thin films and integrated circuits, as stress resistance is a critical factor affecting the performance, reliability, and lifetime of the final electronic device.

While crystal orientation and mapping analyses are critical across the industry, different users have different needs in terms of speed, accuracy, and the size of the instrument itself. In this blog we compare Malvern Pananalytical’s Omega/Theta and SDCOM systems – read on to find out which applications each instrument is best suited for.

What determines your needs in terms of crystal orientation and mapping?

The perfect instrument would provide the highest level of accuracy at ultra-fast speeds while being versatile enough to handle many sample sizes and types of analyses, in a small enough format to fit in environments where space is at a premium. However, the reality is that a balance must be made between these capabilities – so how can you determine the balance you need?

We advise that you consider:

Precision: Do you need to detect ultra-fine stress gradients or misorientations, or are you only verifying basic crystal orientation?
Flexibility: Do you need to make routine, straightforward measurements, or do you also need advanced mapping and scanning capabilities?
Sample scale: Are you analyzing small-scale, experimental samples, or large-scale, standardized production samples?
Cost efficiency: Are deeper insights critical, justifying a higher cost?
Uptime: If your instrument will be performing longer experiments, you need to make sure it has cooling capabilities to prevent overheating.

Omega/Theta: The high-precision powerhouse

This system is designed for users who require the highest levels of precision and flexibility. For example, evaluating residual stress in cutting-edge, nanoscale semiconductor devices or strained silicon channels requires the Omega/Theta’s 0.003° standard deviation, which ensures that even the smallest misorientation or strain gradient is measured accurately.

The Omega/Theta also supports large-area mapping and accommodates bigger and heavier samples than its counterpart, the SDCOM. It’s versatile enough to handle complex analytical tasks, equipped with advanced functionalities like Theta Scan and Rocking Curves to provide insight into stress distribution across complex structures.

However, when the highest levels of precision are required, researchers often extend their data acquisition times to ensure a more complete understanding. This extended instrument uptime could lead to overheating! That’s why the Omega/Theta is equipped with a water cooling system to ensure optimal performance, even during extended operations.

With more orientation and transfer accessories compared to the SDCOM, and support for advanced stacking and grinding stages, the Omega/Theta is an excellent choice for researchers who require intricate material characterizations.

SDCOM: The compact and efficient solution

Not all applications require 0.003° standard deviation, advanced functionalities, or water cooling. For more basic and cost-effective crystal orientation measurements, SDCOM is the answer.

If your needs are for quality control in mid-scale integrated circuit fabrication, for instance, the larger operating area and more complex setup of the Omega/Theta would add unnecessary complexity without providing additional value.

Instead, the SDCOM’s compact, benchtop design enables seamless integration into your workflows, and its faster setup makes it ideal for high-throughput environments. The SDCOM’s air-cooled system is also more cost-effective than its water-cooled counterpart, resulting in a low cost of operation and maximum profitability.

Yet, the SDCOM remains a powerful instrument: with an accuracy of up to 0.01° standard deviation, it can provide consistent and dependable results for most routine applications. It is also ideal for small area mapping, and can support stacking stages – although it remains best suited for less complex material analysis scenarios.

The SDCOM is therefore ideal when your crystal orientation and mapping needs are more basic, or when a compact and cost-effective solution is needed for small samples and simpler setups.

Find the best solution for your needs

The flexibility of Malvern Panalytical’s portfolio for the semiconductor industry doesn’t stop at the Omega/Theta and SDCOM. We can help you find the instrument that best fits your needs, challenges, and resources – and help you unlock new possibilities in material analysis.

If you’d like to discuss further with our experts or even book a demo for the Omega/Theta or SDCOM, please get in touch today!

For more information, don’t hesitate to visit our semiconductor page, follow our updates on LinkedIn, or subscribe to our newsletter for the latest industry insights and innovations.

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