Safety in the Semiconductor Industry

As the semiconductor industry expands and gets more complex, the safety requirements in the manufacturing environment becomes even stricter. More and more semiconductor fabs require full compliancy to the SEMI-S2 standard.

What is the SEMI-S2 standard?

“Semiconductor Equipment and Materials International (SEMI) is a global industry association with members from all sectors of the semiconductor and related industries. The Environmental Health and Safety (EHS) Committee within SEMI’s International Standards Division, develops industry standards and guidelines that are globally accepted, ensuring the highest level of safety and quality. … SEMI-S2 is the foundation guideline in SEMI’s fleet of safety documents which defines the safety requirements required for semiconductor equipment.” ¹

SEMI-S2 is the most well-known standard in semiconductor manufacturing equipment for EHS. It covers 22 specific EHS categories, including regulatory requirements; electrical, mechanical, fire, chemical, radiation, noise, and ergonomics hazards; emergency shutdown, ventilation, and exhaust specifications; hazard warnings and more.

2830ZT SEMI-S2 compliance

I am proud to announce that the 2830 ZT Wafer Analyzer has recently been certified by DEKRA as compliant to the latest SEMI-S2 standard. Having this certificate means that Malvern Panalytical customers can trust to buy a completely safe instrument, ensuring and improving safety in their semiconductor manufacturing environment.

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• High-resolution XRD solutions for semiconductor materials

1 TÜV SÜD, 2019, www.tuvsud.com/en/industries/manufacturing/machinery-and-robotics/semi-assessment