High-resolution X-ray diffraction is a powerful tool for the non-destructive structural analysis of epitaxial layers, heterostructures and superlattice systems.
It is a standard tool used in industrial production, as well as during the development phase of epitaxial grown structures.
Diffraction data patterns
A lot of important information can be obtained from the diffraction patterns, including:
- alloy composition of epitaxial layers
- uniformity of epitaxial layers
- epitaxial layer thicknesses
- strain and strain relaxation,
- crystalline perfection related to dislocation density
Even the formation of interdiffusion and intermixing of interfaces can be investigated under certain circumstances.
Data analysis
For a quick inspection, the peak positions of the substrate and layers can be used for the analysis.
However, in general, full pattern simulations based on dynamical scattering theory are applied for the quantitative determination of relevant parameters.
