Epitaxy analysis

Analysis of epitaxial layered structures

High-resolution X-ray diffraction  is a powerful tool for the non-destructive structural analysis of epitaxial layers, heterostructures and superlattice systems. 

It is a standard tool used in industrial production, as well as during the development phase of epitaxial grown structures.

Diffraction data patterns

A lot of important information can be obtained from the diffraction patterns, including: 

  • alloy composition of epitaxial layers
  • uniformity of epitaxial layers
  • epitaxial layer thicknesses
  • strain and strain relaxation, 
  • crystalline perfection related to dislocation density

Even the formation of interdiffusion and intermixing of interfaces can be investigated under certain circumstances.

Data analysis

For a quick inspection, the peak positions of the substrate and layers can be used for the analysis. 

However, in general, full pattern simulations based on dynamical scattering theory are applied for the quantitative determination of relevant parameters.

Empyrean range

Empyrean range

Multipurpose X-ray diffractometers for your analytical needs
X'Pert³ MRD

X'Pert³ MRD

Versatile research & development XRD system
X'Pert³ MRD XL

X'Pert³ MRD XL

Versatile research, development & quality control XRD system
More details Contact sales
More details Contact sales
More details Contact sales
Technology
X-ray Diffraction (XRD)
Measurement type
Epitaxy analysis
Phase identification
Phase quantification
Interface roughness
Thin film metrology
Residual stress
Texture analysis
Reciprocal space analysis
Particle shape
Particle size
Crystal structure determination
Contaminant detection and analysis
3D structure / imaging