2830 ZT 预安装手册
Version number: 4
2830 ZT
The 2830 ZT wavelength dispersive X-ray fluorescence (WDXRF) wafer analyzer offers the ultimate capability for measuring film thickness and composition. Designed specifically for the semiconductor and data storage industry, the 2830 ZT Wafer Analyzer enables the determination of layer composition, thickness, dopant levels and surface uniformity for a wide range of wafers up to 300 mm.
User manuals
2830 ZT Pre-installation manual
Version number: 4
2830 ZT User Guide
Version number: 2
Software downloads
Please contact support for the latest software version.
Events and training
All events
Malvern Panalytical Future Days: Focus On Semiconductor
- Products:
- Crystal orientation range, 2830 ZT, X'Pert3 range
- Technology:
- X-ray Fluorescence (XRF), Dynamic Light Scattering, Wavelength Dispersive X-ray Fluorescence (WDXRF), X-ray Diffraction (XRD)
- Industry:
- Semiconductor/Electronics