2830 ZT

Continuous capability and speed

The 4 kW SST-mAX X-ray tube features groundbreaking ZETA technology which drastically reduces the effects of X-ray tube aging. This ‘new tube’ performance is maintained throughout the tube’s lifetime, and together with high sensitivity, ZETA technology ensures that rapid analysis and short measurement times are upheld throughout the tube’s lifetime. ZETA technology robustly reduces the need for drift correction and recalibration, which increases productivity and uptime of the instrument.

Maximized uptime

Conventional X-ray tubes suffer tungsten evaporation, which causes deposits on the inside of the tube’s beryllium window. Instrumentation using such X-ray tubes requires regular drift correction to compensate for decreasing intensity, especially for light elements. 

Implementation of the SST-mAX Tube in the 2830 ZT solves this drift problem, thereby maximizing uptime and maintaining instrument precision over time.

Easy to use

The 2830 ZT is supplied with the advanced SuperQ software, which includes FP Multi, the software package specifically designed for multi-layer analysis. The software’s user interface ensures that even inexperienced operators can carry out fully automated fundamental parameter analysis of multi-layers.
The instrument's SuperQ software has a wide range of easy-to-use modules designed for flexible operation by researchers and engineers. Switching between recipes is easy, as is adjusting equipment parameters to suit user preferences.

FALMO-2G

The FALMO-2G easily integrates into any lab or fab: from simple manual carrier loading to full automation. A fully flexible design enables the fab manager to choose from FOUP, SMIF or open cassette load ports, with either a single or dual load port configuration. The various configurations FALMO-2G are all supported by GEM300 compliant software. The footprint of the FALMO-2G has been minimized without compromising flexibility, functionality 

Flexible operation

The instrument's SuperQ software has a wide range of easy-to-use modules designed for flexible operation by researchers and engineers. Switching between recipes is easy, as is adjusting equipment parameters to suit user preferences.

Sample handling	X-ray tube	Channels	Installation
Wafers of 100 - 300 mm by direct loading; smaller sizes can be handled by special adapters	SST-mAX75, tapered nose, end-window tube, SST-mAX50  an option	Up to 24 fixed channels	SEMI S2/S8 compliant
FOUP, SMIF, open cassette and manual loading options available	Measurement spot size 40 and 10 mm; other spot sizes possible	Max. 2 goniometers	Full SECS/GEM compliant
Troughput up to 25 wafers per hour	Zeta Technology	Ultra-high performance Boron channel  for highest sensitivity and throughput
		Special high performance channles for high sensitivty and high thorughput available for B, C, N, O, F, Mg, Wsix, TiSix, CoSix
		Non-inflammable argon/methane
		Flow counter
		Sealed counter
		Scanner 10 º-100 º 2θ
		Scintillation with 300 μm Be window

Support services 

• Phone and remote support
• Preventive maintenance and checkups
• Flexible Customer Care Agreements
• Performance certificates
• Hardware and software upgrades
• Local and global support

Expertise

• Turnkey solutions for elemental and structural semiconductor metrology
• Automation and consultancy
• Training and education