X'Pert³ MRD
The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control.
Features include
- Wafer max. diameter: 100 mm
- SECS/GEM
- Cleanroom ISO 4
The improved X’Pert platform
The successful X'Pert platform is continued by the Malvern Panalytical’s X'Pert³ range of X-ray diffraction systems. With new on-board control electronics, compliance with the latest and most stringent X-ray and motion safety norms, advances in eco-friendliness and reliability the X'Pert³ platform is ready for the future.
• Longest lifetime of incident beam components with CRISP
• Maximum uptime with pneumatic shutters and beam attenuators
• Easy extension towards new applications thanks to 2nd generation PreFIX technology
• Rapid, reliable tool-free exchange of tube focus position
• New on-board control electronics with direct internet connection
• Compliance with the most stringent safety regulations
The X'Pert³ MRD systems offer advanced and innovative X-ray diffraction solutions from research to process development and process control.
Features include
An extra PreFIX mounting platform allows mounting of an X-ray mirror and a high-resolution monochromator in-line, increasing significantly the intensity of the incident beam.
Features include
X'Pert³ MRDVersatile research & development XRD system |
X'Pert³ MRD XLVersatile research, development & quality control XRD system |
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|---|---|---|
| Technology | ||
| X-ray Diffraction (XRD) | ||
| Measurement type | ||
| Phase identification | ||
| Phase quantification | ||
| Thin film metrology | ||
| Residual stress | ||
| Interface roughness | ||
| Epitaxy analysis | ||
| Texture analysis | ||
| Reciprocal space analysis | ||
| Wafer max. diameter | 100 mm | 300 mm |
| SECS/GEM | ||
| Cleanroom ISO 4 | ||